Actuation circuit for MEMS structures
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United States of America Patent
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Jun 5, 2007
Grant Date -
Jun 23, 2005
app pub date -
Dec 17, 2003
filing date -
Dec 17, 2003
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An actuation circuit which actuates force electrodes using an open loop transconductance stage. The actuation circuit includes at least a first output and a second output, and a first input. The circuit includes a current sink coupled to the first output which is enabled when a current is applied to said first input. The circuit also includes a decision switch which is coupled to the current sink and which enables a current path from the first input to the second output when a voltage present at said first output reaches a predetermined minimum level.
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