Crystallization apparatus, crystallization method, device, and light modulation element
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United States of America Patent
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Mar 1, 2011
Grant Date -
Sep 25, 2008
app pub date -
Mar 19, 2008
filing date -
Mar 23, 2007
priority date (Note) -
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Abstract
A crystallization apparatus includes a light modulation element, and an image forming optical system that forms a light intensity distribution set based on light transmitted through the light modulation element on an irradiation surface. The crystallization apparatus irradiates a non-single crystal semiconductor film with light having the light intensity distribution to generate a crystallized semiconductor film. A curvature radius of at least one isointensity line of a light intensity substantially varies along the isointensity line in the light intensity distribution on the irradiation surface, and a curvature radius of at least a part of the isointensity line has a minimum value of 0.3 μm or below.
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