Waveguide-integrated avalanche photodiode
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United States of America
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May 3, 2022
Grant Date -
Jun 11, 2020
app pub date -
Dec 6, 2019
filing date -
Dec 6, 2019
priority date (Note) -
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status (Latency Note)
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Abstract
Various embodiments of a monolithic avalanche photodiode (APD) are described, which may be fabricated on a silicon-on-insulator substrate. The monolithic APD includes an optical waveguide that guides an incident light to an active region of the APD. An optical coupler is integrally formed with the optical waveguide to capture the incident light. The monolithic APD also includes an optical reflector to reflect a portion of the incident light that is not readily captured by the optical coupler back to the optical coupler for further capturing. The active region includes an absorption layer for converting the incident light into a photocurrent, an epitaxial structure for amplifying the photocurrent by avalanche multiplication, as well as a pair of electrical conductors for conducting the amplified photocurrent.
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