Optical filter, analytical instrument, optical apparatus, and method of manufacturing optical filter
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United States of America Patent
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Aug 20, 2013
Grant Date -
Sep 15, 2011
app pub date -
Feb 17, 2011
filing date -
Mar 15, 2010
priority date (Note) -
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Abstract
An optical filter according to the invention includes: first and second substrates opposed to each other; first and second reflecting films provided to the first and second substrates; first and second bonding films provided to the first and second substrates; and first and second barrier films disposed on surfaces of the first and second reflecting films, wherein the first barrier film has a transmittance of ozone lower than a transmittance of ozone the first reflecting film has, and the second barrier film has a transmittance of ozone lower than a transmittance of ozone the second reflecting film has. Accordingly, the reflecting films are protected from ozone or ultraviolet radiation during the manufacturing process of the optical filter and thereby the optical filter characteristics is prevented from being deteriorated.
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