Article comprising a freestanding micro-tube and method therefor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Apr 8, 2003
Grant Date -
N/A
app pub date -
Sep 13, 2000
filing date -
Sep 13, 2000
priority date (Note) -
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status (Latency Note)
Importance
Abstract
A free-standing hollow micro-tube that provides, in some embodiments, a flexible support for a movable platform. The hollow micro-tube is actuated to flex at substantially lower voltages than solid supports. Consequently, articles incorporating the micro-tubes that may be actuated by electrostatic forces, such as an XY translation stage and an array of pedestal mirrors, operate at reduced voltages.
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