Ultra-compact silicon waveguide mode converter based on meta-surface structure

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United States of America Patent

PATENT NO 11808980
APP PUB NO 20230103057A1
SERIAL NO

16977351

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A compact silicon waveguide mode converter, a dielectric meta-surface structure based on periodical oblique subwavelength perturbations, including a top silicon structure with oblique subwavelength perturbations etched in certain periods with period length of Λ, a duty cycle and an oblique angle θ on the SOI substrate. The invention adopts an all-dielectric meta-surface structure with oblique subwavelength perturbation, which can achieve a compact mode conversion from fundamental mode to arbitrary high-order mode of silicon waveguide, and can improve the optical communication capacity greatly.

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Patent Owner(s)

  • SHANGHAI JIAOTONG UNIVERSITY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
He, Yu Shanghai, CN 71 463
Su, Yikai Shanghai, CN 9 60
Sun, Lu Shanghai, CN 27 43
Wang, Hongwei Shanghai, CN 104 212
Zhang, Yong Shanghai, CN 670 3979

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