High sensitivity, low noise piezoelelctric flexural sensing structure using <011> poled relaxor-based piezoelectric single crystals
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United States of America Patent
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Sep 12, 2006
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app pub date -
Dec 15, 2004
filing date -
Dec 15, 2003
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Abstract
A piezoelectric flexural sensing structure having increased sensitivity and decreased noise, without sacrifice of the sensor bandwidth. The structure is made up of a proof mass, a beam with a base and optionally having castellated bonding surfaces and two <011> poled bonding mode PMN-PT crystal plates mounted on the beam.
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