Counter pole with permanent magnets
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United States of America Patent
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Aug 16, 2022
Grant Date -
N/A
app pub date -
Dec 18, 2020
filing date -
Dec 18, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
A charged particle beam system can include a vacuum chamber, a specimen holder for holding a specimen within the vacuum chamber, and a charged particle column. The charged particle column can include a charged particle source for producing a beam of charged particles along an optical axis and a magnetic immersion lens for focusing the beam of charged particles. The magnetic immersion lens can include a first lens pole disposed adjacent a first surface of the specimen, an excitation coil surrounding the first lens pole, and a counterpole disposed adjacent a second surface of the specimen, the counterpole including one or more magnets disposed on the counterpole.
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