Process for the manufacture of solar cells

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United States of America Patent

PATENT NO 10453986
APP PUB NO 20100288330A1
SERIAL NO

12863355

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Abstract

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Solar cells are manufactured from P-type doped monocrystalline or polycrystalline silicon ingots by sawing wafers and applying an N-type doping. The wafers can be improved by etching them, especially in a plasma assisted process, with fluorine, carbonyl fluoride, SF6 or NF3. Hereby, the surface is roughened so that the degree of light reflection is reduced, cracks caused from the sawing operation are prevented from proliferation, and glass-like phosphorus-containing oxide coatings caused by phosphorus doping are removed.

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Patent Owner(s)

Patent OwnerAddress
SOLVAY FLUOR GMBH30173 HANNOVER

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Riva, Marcello Hannover, DE 8 31

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