Positive-acting radiation-sensitive mixture and recording material produced therewith

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United States of America Patent

PATENT NO 5498506
SERIAL NO

08362491

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Abstract

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The invention relates to a radiation-sensitive mixture comprising a) a binder which is insoluble in water but soluble or at least swellable in aqueous alkaline solution, b) a compound which forms an acid under the action of actinic radiation and c) a compound which contains at least one C-O-C or C-O-Si bond which can be cleaved by an acid, wherein said mixture additionally contains 0.1 to 70 mol %, based on the maximum amount of acid which can theoretically be produced from the compound b), of at least one compound having at least one nitrogen atom in an amine or amide bond. The mixture is used in particular in the production of electronic components. The invention also relates to a recording material having a substrate and a radiation-sensitive coating.

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Patent Owner(s)

  • CLARIANT GMBH;MERCK PATENT GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Buhr, Gerhard Koenigstein, DE 48 766
Pawlowski, Georg Tokyo, JP 73 933
Roeschert, Horst Ober-Hilbersheim, DE 26 273
Spiess, Walter Dieburg, DE 18 171
Wengenroth, Horst Westerburg, DE 1 18

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