Method for creating double bragg mirror for tight frequency reference control

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United States of America Patent

PATENT NO 11146230
APP PUB NO 20210067126A1
SERIAL NO

16553518

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for creating a double Bragg mirror is provided. The method comprises providing a wafer having a plurality of bulk acoustic wave (BAW) devices at an intermediate stage of manufacturing. A first dielectric layer is deposited over the wafer. A plurality of as-deposited thicknesses of the dielectric layer are determined, each as-deposited thickness corresponding to one BAW device from the plurality of BAW devices. A corresponding trimmed dielectric layer over each of the BAW devices is formed by removing a portion of the dielectric layer over each of the BAW devices, with a thickness of the removed portion determined from a corresponding as-deposited thickness and a target thickness. A Bragg acoustic reflector that includes the corresponding trimmed dielectric layer is formed over each of the BAW devices.

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Patent Owner(s)

  • AGILENT TECHNOLOGIES TEXAS INSTRUMENTS INCORPORATED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dellas, Nicholas S Dallas, US 9 48
Goodlin, Brian Plano, US 13 51
Jackson, Ricky Richardson, US 5 9

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