Structures and methods for forming dynamic random-access devices
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United States of America Patent
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Jul 11, 2023
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N/A
app pub date -
Sep 17, 2021
filing date -
May 7, 2020
priority date (Note) -
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Abstract
Disclosed are DRAM devices and methods of forming DRAM devices. One non-limiting method may include providing a device, the device including a plurality of angled structures formed from a substrate, a bitline and a dielectric between each of the plurality of angled structures, and a drain disposed along each of the plurality of angled structures. The method may further include providing a plurality of mask structures of a patterned masking layer over the plurality of angled structures, the plurality of mask structures being oriented perpendicular to the plurality of angled structures. The method may further include etching the device at a non-zero angle to form a plurality of pillar structures.
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