Reflector structure for improving irradiation uniformity of linear lamp array
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 7, 2002
Grant Date -
N/A
app pub date -
Oct 26, 1999
filing date -
May 12, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A reflector structure is provided for improving irradiation uniformity of a linear lamp array applied in a semiconductor process. The reflector structure includes a central reflector, two side reflectors, and two inclined reflectors. The central reflector is horizontally set above the linear lamp array at a first predetermined distance from a wafer for reflecting light irradiated from a central part of the linear lamp array to the wafer. The two side reflectors are horizontally set above the linear lamp at a second predetermined distance to the wafer, wherein the second predetermined distance is less than the first predetermined distance, and respectively connected to two opposite side parts of the central reflector for reflecting light irradiated from side parts of the linear lamp array to the wafer. The two inclined reflectors are respectively connected to one side of each of the two first side reflectors at an inclined angel to the wafer for reflecting light irradiated from two end parts of the linear lamp array to the wafer.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully