High cleanliness article transport system
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United States of America Patent
Stats
-
Aug 17, 2010
Grant Date -
Nov 12, 2009
app pub date -
Jul 23, 2009
filing date -
Aug 17, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A semiconductor reticle transportation container includes a box and a base, the box having an opening and the base including a reticle support. The reticle is placed on the support and the box is placed on the base so that the reticle passes through the opening while being lifted off of the support by plungers contacting the lower edge of the reticle. After the box is closed, the reticle is compliantly constrained horizontally and vertically and is held away from the support.
First Claim
Family
International Classification(s)
Cited Art Landscape
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