Apparatus for generating partially coherent radiation

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Feb 22, 2005
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Sep 18, 2003
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Feb 28, 2003
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Aug 30, 2001

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Abstract

Techniques for generating partially coherent radiation and particularly for converting effectively coherent radiation from a synchrotron to partially coherent EUV radiation suitable for projection lithography.

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EUV LLC

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Inventor Name	Address	# of filed Patents	Total Citations
Naulleau, Patrick P	Oakland, CA	14	233

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Apparatus for generating partially coherent radiation

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United States of America Patent

10377947

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PATENT NO	6859263
APP PUB NO	20030174303A1
SERIAL NO	10377947
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 22, 2005	US,6859263,B2 US6859263B2	GRANTED PATENT AS SECOND PUBLICATION
September 18, 2003	US,20030174303,A1 US20030174303A1	FIRST PUBLISHED PATENT APPLICATION

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10377947

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