Physical quantity sensor, inertial measurement unit, and method for manufacturing physical quantity sensor

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United States of America Patent

PATENT NO 11698387
SERIAL NO

17474145

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a physical quantity sensor including: a movable body; a base body; and a lid body, in which the movable body is accommodated in a space between the base body and the lid body, the space is sealed with a melt portion obtained by melting a through hole provided in the lid body, the lid body and the melt portion contain silicon, and the melt portion has a continuous curved surface having unevenness.

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Patent Owner(s)

  • SEIKO EPSON CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takizawa, Teruo Matsumoto, JP 62 324

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