Tools for polishing and associated methods
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United States of America Patent
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Feb 24, 2009
Grant Date -
Dec 20, 2007
app pub date -
Jul 6, 2007
filing date -
Feb 17, 2006
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Polishing tools and associated methods are disclosed. In one aspect, a tool for polishing a work piece is provided. Such a tool may include a solid substrate with a greater than 10 wt % graphite having a high degree of graphitization. The solid substrate may have a working surface which has asperities having a tip-to-tip RA value of less than or equal to about 10 μm, and the working surface may have a surface roughness RA value of less than or equal to about 50 μm. A method for making such a tool and a method for polishing a work piece are also presented.
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