Blind, exposure apparatus having the blind and method of driving the exposure apparatus
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United States of America Patent
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Feb 2, 2016
Grant Date -
Apr 11, 2013
app pub date -
Apr 3, 2012
filing date -
Apr 5, 2011
priority date (Note) -
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status (Latency Note)
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Abstract
An exposure apparatus includes a light source, a mask and a blind. The light source is disposed over a substrate. The light source cyclically radiates light. The mask is disposed between the light source and the substrate. The mask includes an exposure region and a peripheral region. The peripheral region surrounds the exposure region. A pattern is formed in the exposure region. A plurality of first alignment marks is disposed in the peripheral region. The blind is disposed between the light source and the mask. The blind includes a blocking plate and an adjusting part. The blocking part may move across the substrate. The blocking plate includes second alignment marks disposed at end portions of the blocking plate, opposite to each other. The adjusting part adjusts a position of the blocking plate.
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