Vacuum sealing radio frequency (RF) and low frequency conducting actuator
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United States of America Patent
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-
Dec 3, 2013
Grant Date -
Jun 18, 2009
app pub date -
Dec 12, 2008
filing date -
Dec 12, 2007
priority date (Note) -
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status (Latency Note)
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Abstract
A linear actuator comprised of an actuator body having a first portion and a second portion, each arranged along a longitudinal axis of the actuator body. A vacuum bellows is concentrically located in the first portion and is configured to seal a vacuum environment from the second portion. A linear motion shaft is concentrically located substantially within the actuator body and is configured to move in a linear direction along the longitudinal axis. An electrically conductive portion of the shaft is concentrically located substantially within the vacuum bellows and electrically insulated therefrom and is configured to receive and conduct a signal. A lift force generating portion of the shaft is concentrically located substantially within the second portion. An electrical contact pad is electrically coupled to the conductive portion of the shaft and is configured to couple the signal to another surface upon activation of the shaft.
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