Integrated trench capacitor formed in an epitaxial layer

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United States of America Patent

PATENT NO 10720490
APP PUB NO 20200152729A1
SERIAL NO

16732371

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Abstract

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A trench capacitor includes at least one epitaxial semiconductor surface layer on a semiconductor substrate having a doping level that is less than a doping level of the semiconductor substrate. A plurality of trenches are formed through at least one half of a thickness of the epitaxial semiconductor surface layer. The epitaxial semiconductor surface layer is thicker than a depth of the plurality of trenches. At least one capacitor dielectric layer lines a surface of the trenches. At least one trench fill layer on the dielectric layer fills the trenches.

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Patent Owner(s)

Patent OwnerAddress
TEXAS INSTRUMENTS INCORPORATEDP O BOX 655474 MAIL STATION 3999 DALLAS TX 75265-5474 75265-5474

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Jain, Manoj Plano, US 18 267
Jia, Jiao Chengdu, CN 4 7
Lin, He Frisco, US 18 48
Liu, Yunlong Chengdu, CN 46 160

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