Mold for microlens and process for producing the same

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United States of America Patent

PATENT NO 8366949
APP PUB NO 20090194666A1
SERIAL NO

12063140

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Abstract

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A mold for producing microlenses or a microlens array is produced by sequentially carrying out an etching step of forming quadrangular pyramid concave parts on a single crystal silicon substrate by anisotropic etching and an ion etching step of forming molding concave parts with spherical or cylindrical surface parts from the quadrangular pyramid concave parts.

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Inventor Name Address # of filed Patents Total Citations
Takamoto, Kiichi Takamatsu, JP 2 48

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