Ceramic heater
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United States of America Patent
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-
Feb 17, 1987
Grant Date -
N/A
app pub date -
Feb 25, 1986
filing date -
Feb 28, 1985
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A ceramic heater has a heater element made of a mixture including MoSi.sub.2 and Si.sub.3 N.sub.4 powder as a main ingredient and silica (SiO.sub.2) powder as an additive, a heater support member made of an electrically insulating ceramic sintered body for supporting the heater element and an electric current supply means for supplying an electric current to the heater element. The composition of the mixture for the heater element is defined so as to satisfy the following formula: 0.035.ltoreq.B/A<0.35 where A is the amount of Si.sub.3 N.sub.4 expressed by mol percent of the total amount of the main ingredient of MoSi.sub.2 and Si.sub.3 N.sub.4 and B is the amount of SiO.sub.2 expressed by mol percent of the total amount of the main ingredient of MoSi.sub.2 and Si.sub.3 N.sub.4.
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