Semiconductor device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jul 9, 2002
Grant Date -
N/A
app pub date -
Apr 6, 2000
filing date -
Sep 27, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Contact holes which reach source/drain regions shared by access transistors and driver transistors are formed in a self-alignment manner with a silicon nitride film for covering gate electrodes. Therefore, contact plugs formed in the contact holes have an L plan shape. As a result, a semiconductor device including an SRAM can be obtained in which the transistor performance of both the access transistors and the driver transistors is improved and the difference in voltage dependence properties between the driver transistors and the load transistors is improved.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully