Capacitor and etching method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11688557
APP PUB NO 20210091171A1
SERIAL NO

16998019

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Abstract

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According to an embodiment, a capacitor includes a conductive substrate, a conductive layer, a dielectric layer therebetween, and first and second internal electrodes. The substrate has first and second main surfaces. One partial region of the first main surface is provided with first recesses. A region of the second surface corresponding to a combination of the one partial region and another partial region is provided with second recesses. The conductive layer covers the main surfaces and side walls and bottom surfaces of the recesses. The first internal electrode is provided on the one partial region and electrically connected to the conductive layer. The second internal electrode is provided on the another partial region and electrically connected to the substrate.

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Patent Owner(s)

  • KABUSHIKI KAISHA TOSHIBA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Higuchi, Kazuhito Yokohama, JP 74 982
Obata, Susumu Yokohama, JP 64 944
Sano, Mitsuo Kamakura, JP 26 39
Shimokawa, Kazuo Yokohama, JP 57 677

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