Semiconductor device and manufacturing method thereof

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United States of America Patent

PATENT NO 11901332
APP PUB NO 20210366871A1
SERIAL NO

17340930

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Abstract

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A semiconductor device structure and a method for manufacturing a semiconductor device. As a non-limiting example, various aspects of this disclosure provide a method for manufacturing a semiconductor device that comprises ordering and performing processing steps in a manner that prevents warpage deformation from occurring to a wafer and/or die due to mismatching thermal coefficients.

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Patent Owner(s)

Patent OwnerAddress
AMKOR TECHNOLOGY SINGAPORE HOLDING PTE LTDVALLEY POINT #12-03

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Do Hyung Seongnam-si, KR 258 2536
Kim, Dong Jin Gwangju, KR 134 471
Kim, Jin Han Namyangju-si, KR 78 466
Ko, Yeong Beom Gwangju, KR 23 99
Rinne, Glenn Apex, US 27 181

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