Manufacturing method for a trench capacitor having an isolation collar electrically connected with a substrate on a single side via a buried contact for use in a semiconductor memory cell
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United States of America Patent
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Dec 25, 2007
Grant Date -
Nov 2, 2006
app pub date -
Apr 27, 2005
filing date -
Apr 27, 2005
priority date (Note) -
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Abstract
The present invention relates to a manufacturing method for a trench capacitor having an isolation collar which is electrically connected with a substrate on a single side via a buried contact. More specifically, the present invention relates to manufacturing method for a trench capacitor having an isolation collar with a metal conductive fill in the collar region connected to a metal fill in the capacitor region.
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