Detector-shield assembly for X-ray reflectometric system
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United States of America Patent
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Aug 3, 2004
Grant Date -
N/A
app pub date -
Oct 2, 2001
filing date -
Oct 10, 2000
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Abstract
A detector assembly is introduced that provides shielding of irradiation vulnerable regions of an X-ray detector against directly impinging and scattered X-rays. A shielding unit has a primary aperture to shape an X-ray beam reflected from a test area of a work piece such that the shaped beam directly impinges an X-ray sensing area of the detector. A secondary aperture shields off X-rays scattering off along the edges of the primary aperture. In the preferred embodiment, the shielding unit is a monolithic structure. An area between primary and secondary aperture is laterally recessed to prevent a portion of scattered X-rays from being deflected onto the sensing area.
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- 15 United States
- 10 France
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- 7 China
- 5 Korea
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Patent Owner(s)
- THERMA-WAVE, INC.
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Koppel, Louis N | Redwood City, CA | 8 | 363 |
Schmelz, Charles | Redwood City, CA | 1 | 0 |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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