Control of oxygen concentration in single crystal pulled up from melt containing Group-V element
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United States of America Patent
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-
Jun 11, 1996
Issued Date -
N/A
app pub date -
Aug 17, 1994
filing date -
Mar 29, 1993
priority date (Note) -
Expired
status (Latency Note)
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Abstract
The amount of Group-V element included in a melt 6 has the close relationship with the oxygen concentration of the melt 6. This relationship is utilized for controlling the oxygen concentration of a single crystal 8 at a high level. The content of Group-V element is calculated from the weight of the melt 6 gauged by a gravimeter 11 and compared with a preset value in a control unit 12. When the calculated content is smaller than the preset value, the control signal to additionally supply Group-V element to the melt 6 is outputted from the control unit 12 to a feeder 14. When the calculated content is larger than the preset value, the control signal to supply a raw material to the melt 6 is outputted to another feeder 13.
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