Method of making a piezoelectric device
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United States of America Patent
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Jun 7, 2011
Grant Date -
Feb 19, 2009
app pub date -
Aug 13, 2008
filing date -
Aug 13, 2007
priority date (Note) -
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Abstract
A method of forming a piezoelectric device is disclosed. In one such method, a coating material is formed. The coating material has a piezoelectric precursor. The coating material is applied to a first electrode. The precursor is heated to a temperature that is above the Curie temperature of the precursor, but below the melting temperature of the precursor. While the precursor is above its Curie temperature, a voltage is applied across the precursor. While the voltage is applied across the precursor, the temperature of the precursor is reduced to below the Curie temperature.
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