Vacuum measurement device
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 11, 2004
Grant Date -
Aug 1, 2002
app pub date -
Aug 27, 2001
filing date -
Aug 28, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
To carry out measurements in the vacuum, for example for quality control in the production of semiconductors, conventional stand alone measuring machines are installed. They are very cost, space and time intensive. To enable a process oriented measurement under optimal conditions, a device with a two part case is proposed that can be moved in a vacuum chamber, whereby one part of the case projects into the vacuum chamber and the other part of the case is located outside the vacuum chamber. The case can receive a measurement system. In addition, an adjusting device, engaging with the case, and a counterpull device, engaging with the second part of the case, are provided.
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