Method and system for detecting cleanliness in cavity of target device

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United States of America Patent

PATENT NO 11927526
APP PUB NO 20230038908A1
SERIAL NO

17512894

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Abstract

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A device detection method and system are provided. The method includes: acquiring first spectral intensity graphs for predetermined regions in the cavity of the target device; acquiring second spectral intensity graphs for the predetermined regions when the target device has finished N processing tasks, where N is a natural number; and detecting the cleanliness in the cavity of the target device according to the first spectral intensity graphs and the second spectral intensity graphs.

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Patent Owner(s)

  • CHANGXIN MEMORY TECHNOLOGIES, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Ben Hefei, CN 79 872

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