Imprint material containing silsesquioxane compound and modified silicone compound
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United States of America Patent
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Jul 16, 2019
Grant Date -
Sep 1, 2016
app pub date -
Oct 6, 2014
filing date -
Oct 30, 2013
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A imprint material is provided, and a film that is prepared from the material and to which the pattern is transferred. An imprint material including: (A), (B), (C) and (D) components; a ratio of the amount of the (B) component to a total amount of the (A) component and the (B) component of 100% by mass is 5% by mass or more and 25% by mass or less: (A) a silsesquioxane compound having a repeating unit of Formula (1) and having two or more polymerizable groups of X0 in Formula (1); (B) a silicone compound having a repeating unit of Formula (2) and having two polymerizable groups at ends thereof; (C) a photopolymerization initiator; and (D) a solvent
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