Method of fabricating a vertically integrated memory cell

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United States of America Patent

PATENT NO 7098122
SERIAL NO

10873689

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Abstract

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A unique cell structure for use in flash memory cell and a method of fabricating the memory cell. More particularly, a vertically integrated transistor having a pair of floating gates is fabricated within a trench in a substrate. The floating gates are fabricated using sidewall spacers within the trench. A doped region is buried at the bottom of the trench. The structure can be fabricated such that the buried doped region provides a connecting layer in a multi-bit flash memory cell. Alternatively, the buried doped region may be used as a buried bitline in a single bit flash memory cell.

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Patent Owner(s)

  • MICRON TECHNOLOGY, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gonzalez, Fernando Boise, ID 358 11597

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