Tunable gas distribution plate assembly
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United States of America Patent
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-
Sep 18, 2007
Grant Date -
Jul 8, 2004
app pub date -
Jan 7, 2003
filing date -
Jan 7, 2003
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A gas distribution plate assembly and a method for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate assembly includes a tuning plate coupled to a diffuser plate. The tuning plate has a plurality of orifice holes formed therethrough that align with a plurality of apertures formed through the diffuser plate, where the apertures each have a greater sectional area than the holes in the tuning plate. Each aperture is aligned with a respective hole to define gas passages through the gas distribution plate assembly. The tuning plate may be interchanged with a replacement tuning plate to change the gas flow characteristics through the gas distribution plate assembly.
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