Method and apparatus for delivering and recycling a bubble-free liquid chemical
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United States of America Patent
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Jan 9, 2001
Grant Date -
N/A
app pub date -
Jun 5, 1997
filing date -
Jun 5, 1997
priority date (Note) -
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Abstract
The present invention discloses a method and apparatus for delivering and recycling a liquid such that a substantially air bubble-free liquid flow can be supplied to a process machine and a liquid flow that contains air bubbles can be recycled back into a liquid reservoir for venting away the air bubbles. The method and apparatus is not only capable of supplying air bubble-free liquid to a process machine, but also capable of saving a costly process liquid from being purged out into a waste tank in order to eliminate air bubbles entrapped in the liquid.
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