Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus

United States of America Patent

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Jan 9, 2007
Grant Date
Nov 11, 2004
app pub date
Jun 8, 2004
filing date
Jun 27, 2001

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Abstract

A beam splitting apparatus generates, from incident light having a specific polarization, first and second split light that has the specific polarization.

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Patent Owner(s)

CANON KABUSHIKI KAISHA

International Classification(s)

G01J:MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Kishikawa, Yasuhiro	Tochogi, JP	10	67
Takeuchi, Seiji	Tochigi, JP	91	1693

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Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus

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United States of America Patent

10864250

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PATENT NO	7161675
APP PUB NO	20040223443A1
SERIAL NO	10864250
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
January 09, 2007	US,7161675,B2 US7161675B2	GRANTED PATENT AS SECOND PUBLICATION
November 11, 2004	US,20040223443,A1 US20040223443A1	FIRST PUBLISHED PATENT APPLICATION

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10864250

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