Image sensor with a high absorption layer

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United States of America Patent

PATENT NO 11830892
APP PUB NO 20210091125A1
SERIAL NO

17106350

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Abstract

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An image sensor with high quantum efficiency is provided. In some embodiments, a semiconductor substrate includes a non-porous semiconductor layer along a front side of the semiconductor substrate. A periodic structure is along a back side of the semiconductor substrate. A high absorption layer lines the periodic structure on the back side of the semiconductor substrate. The high absorption layer is a semiconductor material with an energy bandgap less than that of the non-porous semiconductor layer. A photodetector is in the semiconductor substrate and the high absorption layer. A method for manufacturing the image sensor is also provided.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDHSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Chien-Chang Tainan, TW 82 491
Jiang, Ji Heng Tainan, TW 5 22
Tu, Chien Nan Kaohsiung, TW 18 135
Wu, Ming-Chi Kaohsiung, TW 27 166
Yeh, Yu-Lung Kaohsiung, TW 59 268

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