Wafer edge wheel with drying function
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Aug 14, 2007
Grant Date -
Aug 10, 2006
app pub date -
Mar 31, 2006
filing date -
Sep 30, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An edge wheel for supporting and rotating a disk-shaped substrate includes a wheel body having a peripheral groove configured to support an edge of a substrate and at least one radial channel extending into said wheel body from said peripheral groove. An edge wheel dryer and a method for processing a disk-shaped substrate are also described.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully