Defect inspecting apparatus and defect inspecting method
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United States of America Patent
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Mar 3, 2015
Grant Date -
Aug 21, 2014
app pub date -
May 14, 2012
filing date -
Jul 29, 2011
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Abstract
An invention being applied is a defect detecting apparatus that has: an illuminating optical system with a laser light source for irradiating a sample on whose surface a pattern is formed with light; a detecting optical system with a sensor for detecting light generated from the sample illuminated by the illuminating optical system; and a signal processing unit that extracts a defect from an image based on the light detected by the detecting optical system, in which an amplification rate of the sensor is dynamically changed during a time when the light is detected by the detecting optical system.
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