Secondary ion mass spectrometer with independently variable extraction field
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United States of America Patent
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Jul 23, 1991
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N/A
app pub date -
Nov 17, 1989
filing date -
Feb 10, 1987
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Abstract
A method and apparatus for the micro-analysis of a sample surface wherein a mass analyzer is used to analyze secondary ions emitted from the surface in response to the impact of primary radiation. The method comprises: extracting the secondary ions in an electric extraction field maintained by applying an extraction potential difference between the sample and an extraction means, and also maintaining an accelerating potential difference between the sample and the mass analyzer thereby increasing the kinetic energy of the secondary ions to be substantially equal to the energy required for analysis in the mass analyzer; the extraction potential difference being less than the accelerating potential difference. In this way the extraction field can be controlled independently of the accelerating potential between the sample and the mass analyzer.
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