Unconsumed precursor monitoring

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United States of America Patent

PATENT NO 11929270
APP PUB NO 20220285184A1
SERIAL NO

17744856

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Abstract

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A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lakeman, Steve James Newbury Park, US 2 3
Rinzan, Mohamed Buhary Manlius, US 5 10
Song, Chunhua Jamesville, US 4 3

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