Bonded substrate, surface acoustic wave element, surface acoustic wave element device, and bonded substrate manufacturing method

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United States of America Patent

PATENT NO 11777469
APP PUB NO 20200127634A1
SERIAL NO

16622859

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Abstract

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A bonded substrate includes a quartz substrate and a piezoelectric substrate which is bonded on the quartz substrate and on which a surface acoustic wave propagates, wherein the quartz substrate and the piezoelectric substrate are bonded by covalently coupling at a bonding interface, and an orientation of the quartz substrate and an orientation of the piezoelectric substrate intersect with each other on an orthogonal direction side or in the range of 65 degrees to 115 degrees in a bonding surface direction.

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Patent Owner(s)

  • THE JAPAN STEEL WORKS, LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kakio, Shoji Kofu, JP 10 29
Kayano, Rinzo Muroran, JP 13 41
Kishida, Kazuhito Tokyo, JP 11 33
Kurimoto, Kouhei Muroran, JP 7 29
Mizuno, Jun Tokyo, JP 79 830

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