Wafer inspection system including a laser triangulation sensor

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United States of America Patent

PATENT NO 11578967
APP PUB NO 20200191557A1
SERIAL NO

16620317

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Abstract

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One example of an inspection system includes a laser, a magnification changer, and a first camera. The laser projects a line onto a wafer to be inspected. The magnification changer includes a plurality of selectable lenses of different magnification. The first camera images the line projected onto the wafer and outputs three-dimensional line data indicating the height of features of the wafer. Each lens of the magnification changer provides the same nominal focal plane position of the first camera with respect to the wafer.

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Patent Owner(s)

Patent OwnerAddress
ONTO INNOVATION INC16 JONSPIN ROAD WILMINGTON MA 01887

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Schaefer, John Miller Place, US 18 366
Smith, Nicholas Burnsville, US 33 253
Treptau, Jeffrey Lakeville, US 3 1
Voges, Christopher Eden Prairie, US 4 17

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