Chemical mechanical planarization membrane

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United States of America Patent

PATENT NO 11850702
SERIAL NO

17685760

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Abstract

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In some embodiments, the present disclosure relates to a chemical mechanical planarization (CMP) tool. The CMP tool includes a carrier and a malleable membrane coupled to the carrier and having a lower surface facing away from the carrier. The lower surface of the malleable membrane includes a first malleable material within a central region of the lower surface and a second malleable material within a peripheral region of the lower surface, which surrounds the central region. The first malleable material provides the central region of the lower surface with a first stiffness and the second malleable material provides the peripheral region of the lower surface with a second stiffness that is different than the first stiffness.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chien-Wei Taoyuan, TW 69 241
Chen, Cheng-Ping Taichung, TW 12 13
Lai, Tsung-Lung Hsinchu, TW 7 0
Lee, Ren-Dou Hsinchu, TW 21 38
Peng, Sheng-Tai Miaoli County, TW 11 2
Shieh, Tzi-Yi Hsinchu, TW 7 29

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