pH measuring device and pH measuring method

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United States of America Patent

PATENT NO 11802848
SERIAL NO

17295126

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Importance

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Abstract

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A pH measuring device configured to measure a pH of a target liquid includes a main body block including a cavity, a supply line communicating with the cavity, a first drain line communicating with the cavity, and a target liquid supply valve configured to adjust a supply of the target liquid into the supply line. The main body block has an integral structure in which a pH sensor is supported such that the pH sensor is in contact with the target liquid within the cavity.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Shiokawa, Toshiyuki Koshi, JP 6 21

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