Optical sensor for surface inspection and metrology

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United States of America Patent

PATENT NO 11561080
APP PUB NO 20220381550A1
SERIAL NO

17880361

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method of improving axial resolution of interferometric measurements of a 3D feature of a sample may comprise illuminating the feature using a first limited number of successively different wavelengths of light at a time; generating an image of at least the 3D feature based on intensities of light reflected from the feature at each of the successively different wavelengths of light; measuring a fringe pattern of intensity values for each corresponding pixel of the generated images; resampling the measured fringe patterns as k-space interferograms; estimating interference fringe patterns for a spectral range that is longer than available from the generated images using the k-space interferograms; appending the estimated interference fringe patterns to the respective measured fringe patterns; and measuring the height or depth of the 3D feature using the measured interference fringe patterns and appended estimated fringe patterns.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aiyer, Arun Anath Fremont, US 3 0

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