Interferometer movable mirror position measurement apparatus and fourier transform infrared spectroscopy

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United States of America Patent

PATENT NO 11860037
APP PUB NO 20210190590A1
SERIAL NO

17269296

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Abstract

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An interferometer movable mirror position measurement apparatus for determining a position of a movable mirror of an interferometer. The interferometer movable mirror position measurement apparatus including: a laser light source; a phase separation optical system configured to make first light and second light separately detected; a signal conversion unit configured to detect the first light and the second light in synchronization with a position of a movable mirror to generate a first sinusoidal wave signal and a second sinusoidal wave signal, respectively; a phase calculation unit configured to perform normalization and phase difference correction on each of the first sinusoidal wave signal and the second sinusoidal wave signal, and then calculate a phase of the first sinusoidal wave signal or the second sinusoidal wave signal at each time point; and a movable mirror position determination unit configured to determine a position of the movable mirror at a predetermined time point.

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Patent Owner(s)

Patent OwnerAddress
SHIMADZU CORPORATION1 NISHINOKYO-KUWABARA-CHO NAKAGYO-KU KYOTO-SHI KYOTO 6048511 ?6048511

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Muramatsu, Takashi Kyoto, JP 54 214

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