Rapid thermal processing (RTP) system with gas driven rotating substrate

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United States of America Patent

PATENT NO 6005226
SERIAL NO

08977019

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Abstract

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An apparatus, method, and system for Rapid Thermal Processing (RTP), whereby the object to be processed is rotated under the radiation sources of the RTP system by a gas jet system, is presented.

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Patent Owner(s)

  • STEAG RTP SYSTEMS;STEAG-AST ELECTRONIK GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aschner, Helmut Beimerstetten, DE 6 117
Hauke, Andreas Neu-Ulm, DE 2 92
Walk, Ulrich Ulm, DE 3 85
Zernickel, Dieter Ulm, DE 8 127

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