Reflectometric method of measurement and apparatus for realizing the method
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United States of America Patent
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Jan 26, 1993
Issued Date -
N/A
app pub date -
Nov 13, 1991
filing date -
Nov 27, 1985
priority date (Note) -
Expired
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Abstract
A reflectometric method of measurement for a 2-channel reflectometer, wherein in connection with the calibration, the standard sample is placed in the measruing channel (4), the dimming of the measuring channel is set to a random position and the light intensities detected both in the measuring channel and the reference channel (14) are adjusted into balance by adjusting the dimming of the reference channel by aid of the measuring diaphragm (17), and the measuring of the sample is carried out by setting the intensities into balance, likewise by aid of the measuring diaphragm of the reference channel. The reflectance value of the sample under measurement is calculated from the reflectance value of the standard, by aid of the set value of the measuring diaphragm obtained in the measurement and on the basis of the set value of the measuring diaphragm obtained in the calibration measurement.
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