Importance

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Abstract

A wafer carrier positioning structure including a carrier body having a bottom face and a frame body provided in a peripheral part of the bottom face to project downwardly, for housing a wafer therein so that the wafer is parallel to the bottom face. Further, the wafer positioning structure includes a guide member detachably attached to the bottom face of the carrier body, a guide groove provided in the guide member, for engaging with a positioning pin projecting from a mounting face upon mounting the carrier body to the mounting face, so as to guide the carrier body to a regular mounting position, and a locking portion provided in the guide member, locking to an inside face of the frame body while elastically having contact with the inside face.

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First Claim